Use of patterned magnetic films to retain and orient micro-components during fluidic assembly
نویسندگان
چکیده
Patterned magnetic thin films have for the first time been used to orient and retain micron-sized III-V elements on silicon substrates during fluidic hybrid assembly. Modeling of the forces between Ni thin films patterned on one surface of 5–6 m target areas on Si substrates predicts that the strength and fall-off characteristics of the attractive forces can be engineered to orient and securely retain only pills that are right side up. Verification of this behavior has been obtained by assembling 50 100 m2 micropills in recesses with patterns of Sm-Co rectangles. © 2009 American Institute of Physics. DOI: 10.1063/1.3076146
منابع مشابه
Patterned time-orbiting potentials for the confinement and assembly of magnetic dipoles
We present an all-magnetic scheme for the assembly and study of magnetic dipoles within designed confinement profiles that are activated on micro-patterned permalloy films through a precessing magnetic field. Independent control over the confinement and dipolar interactions is achieved by tuning the strength and orientation of the revolving field. The technique is demonstrated with superparamag...
متن کاملNano- and micro-patterning biotemplated magnetic CoPt arrays.
Patterned thin-films of magnetic nanoparticles (MNPs) can be used to make: surfaces for manipulating and sorting cells, sensors, 2D spin-ices and high-density data storage devices. Conventional manufacture of patterned magnetic thin-films is not environmentally friendly because it uses high temperatures (hundreds of degrees Celsius) and high vacuum, which requires expensive specialised equipmen...
متن کاملMicro-patterning of NdFeB and SmCo magnet films for integration into Micro- Electro-Mechanical-Systems
The integration of high performance RE-TM (NdFeB and SmCo) hard magnetic films into Micro-Electro-Mechanical-Systems (MEMS) requires their patterning at the micron scale. In this paper we report on the applicability of standard micro-fabrication steps (film deposition onto topographically patterned substrates, wet etching and planarization) to the patterning of 5 μm thick RE-TM films. While NdF...
متن کاملDesign and Simulation of a Fluidic Micro-Bio-Sensor Based on Resonator Array
In this paper, a fluidic biosensor with possibility to fabricate by Micro-Electro-Mechanical Systems (MEMS) technology is proposed for biomedical mass detection and lab-on-chip applications. This is designed by electromechanical coupling of harmonic micromechanical resonators with harmonic springers as a mechanical resonator array. It can disperse mechanical wave along the array by electrostati...
متن کاملCharacteristics of Double Planar Micro-Inductor with Patterned NiFe Thin-Films for DC/DC Integration
This paper proposes a double-planar-coil microinductor with patterned permalloy magnetic film for high frequency DC–DC integration. The effects of magnetic film’s patterning and thickness on the inductance and quality factor of the micro-inductor are investigated by using COMSOL Multiphysics software. Simulation results indicate that the magnetic film improves the inductance of microinductor ef...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2009